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VM 182

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VM 182

Measuring standard

Coefficient of linear expansion

Two-coordinate DIADUR phase grating

αtherm ≈  10 x 10-6 K-1

Accuracy grade

± 1 µm in longitudinal direction

± 1.5 µm in transverse direction

Measuring length ML

Linear direction in mm

420, 520, 720, 1020, 1220, 1520

Measuring range transverse direction

± 1 mm

Reference mark

One reference mark at beginning of measuring length

Incremental signals

1 VPP

Signal period

4 µm in longitudinal and transverse direction

Measuring step

≥ 0.001 µm (with EIB 74x)

Voltage supply

5 V ± 5 %/< 100 mA (per axis)

Coupling

Magnetically to a plane surface; bracket available as accessory

Traversing speed

≤ 80 m/min

Weight

Scale

Scanning head

Approx. 340 g + 6.7 g/mm ML

Approx. 1.86 kg